羅克韋爾自動化的控制系統(tǒng)使得半導(dǎo)體的制作發(fā)生了革命性的改變——使得晶片加工吞吐量增加了25%，使得晶片生長時間從一年多縮短到六個星期，縮減了85%，使得整個系統(tǒng)更加靈活、更加可靠。
背景資料
在半導(dǎo)體行業(yè)，自動化系統(tǒng)被用于硅晶片到芯片的加工處理。在這個過程中，為了蝕刻硅晶片表面，會用到快速熱處理、快速熱退火和快速熱化學(xué)蒸汽蒸鍍（RTCVD）。
被稱為晶簇工具的整個系統(tǒng)，包括多個過程，構(gòu)成了擁有三個過程模塊和一個冷卻腔的自動化港。過程模塊包括了先進的半導(dǎo)體晶片加工所需要的各種自動化設(shè)備。
習(xí)慣上，半導(dǎo)體行業(yè)的OEM利用他們自己所擁有的硬件和軟件構(gòu)件系統(tǒng)，利用C 或其他代碼程序進行控制。晶簇工具的開發(fā)商發(fā)現(xiàn)，采用復(fù)雜的編程語言工作增加了開發(fā)時間和培訓(xùn)需要，而計算機也常常崩潰且難以調(diào)整。此外，半導(dǎo)體行業(yè)需要一種標準借口，在系統(tǒng)開發(fā)中使用多個RS232通信口。這些復(fù)雜的需求使得快速而方便地開發(fā)系統(tǒng)面臨著一定的挑戰(zhàn)。
問題的提出
半導(dǎo)體晶簇工具的一個特殊開發(fā)商——也是IBM、Inb、摩托羅拉（Motorola）、東芝（Toshiba）等公司的供應(yīng)商——覺得，控制晶片加工系統(tǒng)的傳統(tǒng)方法有著很大的改進空間，從而引發(fā)了超越傳統(tǒng)的半導(dǎo)體技術(shù)的新技術(shù)的研究。
公司需要這樣一個解決方案，它能夠?qū)ιa(chǎn)過程進行管理控制，能夠?qū)γ總€不同模塊的特殊功能進行控制，并且，每塊模塊都可以進行三軸運動控制。除此之外，它需要一個組態(tài)方便、可靠的接口，以便操作人員輸入和反饋數(shù)據(jù)。
為了不浪費高成本的凈化空間，整個系統(tǒng)必須緊湊、易于安裝和組態(tài)。從最初的加工系統(tǒng)的開發(fā)，到整個系統(tǒng)的構(gòu)件，絕大部分晶片加工公司需要12至14個月——這部分時間必須縮減。
解決方案
根據(jù)一個管理人員以前的經(jīng)驗，公司找到了羅克韋爾自動化，探討了羅克韋爾自動化的自動化和控制技術(shù)用于半導(dǎo)體行業(yè)的可行性。羅克韋爾自動化提供了最新的產(chǎn)品，公司也意識到，Allen-Bradley的可編程序控制器能夠提供開發(fā)和運行控制系統(tǒng)所需要的速度、靈活性、可靠性，且使用方便。
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ALLEN BRADLEY 1492-CB3-G100 SER B 10A CIRCUIT BREAKER
SEALED ALLEN BRADLEY 1336-F1-SP2A FUSE BUS 100-125HP
Allen Bradley Welding Isolation Contactor 270amp 100W-B
ALLEN BRADLEY 100-A12NZ243 USPP 100A12N243
3 ALLEN BRADLEY MOTOR STARTERS 9 AMP MODEL 100A09NZ3
ALLEN BRADLEY CONTACTOR 100-A09NZ*3 SERIES B
Allen Bradley Manual ULTRA 100 Series Drives __G13
ALLEN BRADLEY 100-A09ND3 CONTACTOR SER. B 600VAC MAX
ALLEN BRADLEY 100-M12ND31S IEC CONTACTOR NIB
ALLEN BRADLEY 700-RT99N100A1 NSFP 700RT99N100A1
Allen-Bradley 1336-B100-EOH-L3-S1 100 HP / 100HP Drive
Allen Bradley 1492-CB1G100 C
Allen Bradley Contactor 38 amp 3pole 600V 25HP 100A38NA
Allen Bradley 60 Amp Contactor 100-B110N*3 Coil 240/220
Allen Bradley Mini AC Contactor, #100-M05N*3, 100-MO5N
One-day shipping available
ALLEN BRADLEY 100-A18NB3 USPP 100A18NB3
ALLEN BRADLEY 100-A18NKD3 NSFP 100A18NKD3
ALLEN BRADLEY 1492-100XF TERMINAL BLOCK
ALLEN BRADLEY 100-MO5NZ3 IEC CONTACTOR 24VDC NEW
1 NIB ALLEN BRADLEY 100-FA04 100FA04 AUXILIARY CONTACT
Allen Bradley 600V Contactor 100-B110N*3 100B110N3
One-day shipping available
ALLEN BRADLEY 100 SA20 AUXLIARY CONTACT NIB
ALLEN BRADLEY 100-A45NH3 USPP 100A45NH3
ALLEN-BRADLEY # 100W-B300ND2 WELDING CONTACTOR
100K Allen Bradley Carbon Comp Resistor 1/4w 50 NOS RCR
ALLEN BRADLEY 100-MC CONTACTOR MECHANICAL INTERLOCK
Expedited shipping available
1492SPU1C100 NEW ALLEN BRADLEY 1492 SPU1C100
One-day shipping available
ALLEN BRADLEY 100-A12ND3 Stater + 195-FA20 + 199-FSMA1
1 NIB ALLEN BRADLEY 100-FA13 100FA13 AUXILIARY CONTACT
Allen Bradley 1336plus drive 1336F-BRF100-AE-EN-HAS2-L5
Allen Bradley 193-BSB 22 B Relay Plus 100-A12NL31 B
100B180ND3 NEW ALLEN BRADLEY 100 B180ND3 FREE SHIPPING
One-day shipping available
NEW ALLEN BRADLEY 100-A75N*3 CONTACTOR 100A75N3
Expedited shipping available
Allen Bradley 100-A09ND3 Ser B 100A09ND3 (QTY 2)
ALLEN BRADLEY 809S-DB100A1 NSPP 809SDB100A1
100B180ND3 NEW ALLEN BRADLEY 100 B180ND3 FREE SHIPPING
One-day shipping available
NIB ALLEN BRADLEY 1492-CB3H100 CIRCUIT BREAKER
Expedited shipping available
ALLEN BRADLEY 100-A09ND3 CONTACTOR100A09ND3
Expedited shipping available
ALLEN BRADLEY 100-A38NA3 USPP 100A38NA3
Allen Bradley 100 Amp 500FLDOD93
One-day shipping available
ALLEN BRADLEY 100W-B300ND3 NSPP 100WB300ND3
ALLEN BRADLEY 100-A18NZJ3 USPP 100A18NZJ3
4 ALLEN BRADLEY MOTOR STARTERS 9 AMP MODEL 100A09NA3
Allen Bradley 2 100-A12NL31 B And Type TH-12
ALLEN BRADLEY 3A100 NSFP 3A100
ALLEN BRADLEY SLC 100 1745-LP101 SER. D PROCESSOR UNIT
Expedited shipping available
ALLEN BRADLEY 3A100 NSPP 3A100
ALLEN BRADLEY 100-A75NL3 NSPP 100A75NL3
ALLEN BRADLEY 100-A12NZ243 NSFP 100A12N243
Allen-Bradley 100-A75N*3 Switch
ALLEN BRADLEY 1492 SP1D100 MINI CIRCUIT BREAKER NIB
ALLEN BRADLEY CABLE ASSEMBLY 9101-1699-100 **NEW**
ALLEN BRADLEY 100-M09NZ243 NSFP 100M09NZ243
ALLEN BRADLEY 700-RT49Z100A1 NSPP 700RT49Z100A1
4 ALLEN BRADLEY DOUBLE RELAYS 100-A09ND3 193-BSB
Allen Bradley 100-A09NZ*3 Ser B 193-A2A1
One-day shipping available
Allen Bradley 100-A60N*3 Contactor 50HP Coil 120V
AB BULLETIN 100 A30NZ 3 B STARTER allen bradley A30NZ3B
ALLEN BRADLEY 100-FAB22 AUXILIARY CONTACT
ALLEN BRADLEY 100-A18NB3 NSFP 100A18NB3
Allen Bradley 1492CB3G100 10A Circuit Breaker (CIR1242)
ALLEN BRADLEY 100-A45NL3 USPP 100A45NL3
ALLEN BRADLEY 1492 SP2D100 MINI CIRCUIT BREAKER NIB
ALLEN BRADLEY 700-ZBR100AZ1
ALLEN BRADLEY 1492-GH100 10 AMP
ALLEN BRADLEY 100-MO5N*3 100MO5N3 100-MO5N-3 CONTACTOR
Expedited shipping available
1492SP2D100 NEW ALLEN BRADLEY 1492 SP2D100 FREE SHIP
One-day shipping available
ALLEN BRADLEY 100-A45ND3 USPP 100A45ND3
Allen Bradley Sz. 5 Welding Contactor 100W-B300N* 2 NNB
330 Allen Bradley Carbon Comp Resistors 1/4w 100pcs Mil
AB ALLEN-BRADLEY 100-FA40 NEW LOT 4
ALLEN BRADLEY 100-A18NH3 USPP 100A18NH3
ALLEN BRADLEY 100W-B300ND3 NSFP 100WB300ND3
ALLEN BRADLEY 100-A38NB3 NSFP 100A38NB3
Allen-Bradley Model: 100-A09ND3 Series B Contactor
ALLEN BRADLEY 100-A30NL3 NSFP 100A30NL3
ALLEN BRADLEY 700-FF100J2U24 SER A OFF DELAY RELAY NNB
ALLEN BRADLEY 100-A38NA3 NSFP 100A38NA3
NEW ALLEN BRADLEY 104-A09NZ243 CONTACT. W/ 100-A09NZ*3
Expedited shipping available
ALLEN BRADLEY 1336S-BRF100-AN-EN4-HA2 NSFP 1336SBRF100A
ALLEN BRADLEY 100-A45NH3 USPP 100A45NH3
Allen Bradley AC Drive 1336F-BRF100-AN-EN-HAS2-L5
ALLEN BRADLEY 100-A45NA3 USPP 100A45NA3
ALLEN BRADLEY 800E-11WE100 LEG. PL. NNB
ALLEN BRADLEY 100-A30NT3 NSFP 100A30NT3
ALLEN BRADLEY 1494V-DS100 USPP 1494VDS100
ALLEN BRADLEY 100-A18NZ3 USPP 100A18NZ3
ALLEN BRADLEY 809S-CB100A1 NSFP 809SCB100A1
ALLEN BRADLEY 100-A18NZJ3 NSPP 100A18NZJ3
QTY:100 ALLEN BRADLEY JANRCR20G121JS
100SA10 NEW ALLEN BRADLEY 100 SA10
One-day shipping available
Allen Bradley Contactor 100-A45N3 45 Amp 120 VAC Coil
Allen Bradley 100K Ohm 1/2W 5% Carbon Comb (5)
Expedited shipping available
ALLEN BRADLEY 100-A30NA3 USPP 100A30NA3
100M09NKD31S NEW ALLEN BRADLEY 100 M09NKD31S FREE SHIP
One-day shipping available
100 Allen Bradley 22 Ohm 10% 1/4W Carbon Comp Resistors
ALLEN BRADLEY SURGE SUPPRESSOR VARISTOR 100-FSV136
ALLEN BRADLEY 1492-CB1 SER. C 10A 2HP H100 1492CB1
Expedited shipping available
LOT OF 2 ALLEN BRADLEY 100-S CONTACT CARTRIDGES
Expedited shipping available
ALLEN BRADLEY 100-FA40 AUX CONTACT 4-N.O. NEW!!!
ALLEN BRADLEY 100-M05NKD3A USPP 100M05NKD3A
Allen Bradley 100-A45N*3, 40 HP Starter Coil 120VAC.
+ thermal overload 18-30A
Allen Bradley Welding Isolation Contactor 100W-B300N2
One-day shipping available
ALLEN BRADLEY 100-A75NX3 USPP 100A75NX3
Allen Bradley 100-B300N D3 Motor Starter
ALLEN BRADLEY 100A-38NZ3 USPP 100A38NZ3
ALLEN BRADLEY 100-A45NJ3 USPP 100A45NJ3
Allen Bradley SLC 100 expansion unit
ALLEN BRADLEY 100-A18NL3 USPP 100A18NL3
ALLEN BRADLEY 100-A12NA3 NSFP 100A12NA3
ALLEN BRADLEY 100-A75NJ3 USPP 100A75NJ3
ALLEN BRADLEY 100-A38NT3 NSFP 100A38NT3
ALLEN BRADLEY 100-A45ND3 STARTER CONTACTOR 45A-600V
2 NEW ALLEN BRADLEY FUSE BUS 1336-F1-SP2A 575V 100 HP
ALLEN BRADLEY 100-A12NJ3 USPP 100A12NJ3
ALLEN BRADLEY 100-A18NZ3 NSPP 100A18NZ3
ALLEN BRADLEY 100-FA22 AUXILIARY CONTACT FRONT MNT. NEW
One-day shipping available
ALLEN BRADLEY 100-M05N*3 MINI CONTACTOR
ALLEN BRADLEY 100-A38NB3 NSPP 100A38NB3
Allen Bradley Starter 100 HP, Nema Size 4, Coil 120VAC
ALLEN BRADLEY 100-A38ND3 USPP 100A38ND3
500FL-DOD93 ALLEN BRADLEY 100AMP CONTINUOUS CONTACTOR
Allen Bradley 100-A09ND3 Contactor New
ALLEN BRADLEY 100-A18ND3 NSFP 100A18ND3
ALLEN BRADLEY 100-A12NL3 USPP 100A12NL3
ALLEN BRADLEY 100-A75NT3 NSFP 100A75NT3
ALLEN BRADLEY 100-A18ND3 USPP 100A18ND3
ALLEN BRADLEY 100-SA01 AUX CONTACT BLOCK 1-NC NEW!
Allen Bradley mini circuit breaker G 100 10 amp
Allen Bradley Mini Contactor - 100-M12NZ243S
ALLEN BRADLEY CONTACTOR NIB CAT#100-A12NZ243 24V DC
ALLEN BRADLEY 1492-CB3H100 10A CIRCUIT BREAKER NIB
Expedited shipping available
Allen Bradley Model: 100-A09ND3 AC Contactor
ALLEN BRADLEY 800H-W100 LEG. PL. GRAY BLANK NNB
ALLEN BRADLEY 800H-W100ELJ LEG. PL. YEL EMERGENCY STOP
ALLEN BRADLEY 100-A24NH3 NSFP 100A24NH3
ALLEN BRADLEY 800H-W100EJ LEG. P. (START)
ALLEN BRADLEY 800H-W100EJ LEG. P. (POWER ON)
Allen Bradley Contactor / Relay # 100-MO9NZ*3
One-day shipping available
ALLEN BRADLEY 100-A30NJ3 NSPP 100A30NJ3
ALLEN BRADLEY 100-A75ND3 USPP 100A75ND3
Allen Bradley Safety Relay Contactor # 700-ZBR100AZ1
One-day shipping available
100M09NA8S NEW ALLEN BRADLEY 100 M09NA8S
One-day shipping available
Allen Bradley Adjustable Drive 10HP 3 Phase 1336SBRF100
ALLEN BRADLEY 100-A30NJ3 NSFP 100A30NJ3
ALLEN BRADLEY 800H-W100E LEG. PL. PULL ON/ PUSH OFF
Allen Bradley Surge Suppressor 100-FSC280, Series A
One-day shipping available
ALLEN BRADLEY 800E-34BE100 LEG. PL. (AUTO MAN) NIB
ALLEN BRADLEY 100-SA11 AUXILIARY CONTACTS NEW IN BOX
ALLEN BRADLEY 1492-G100 CIRCUIT BREAKER
Allen Bradley 1326-CFU-100 Cable Assembly - NEW
ALLEN BRADLEY 100-A30NA3 NSFP 100A30NA3
ALLEN BRADLEY 100-A12NL3 NSFP 100A12NL3
ALLEN BRADLEY 100-A09NZ*3 CONTACTOR
ALLEN BRADLEY 100-A12NT3 NSFP 100A12NT3
Allen Bradley Contactor, #100-B110NZ*3, 100-B110NZ
One-day shipping available
Allen-Bradley A-B 100-A75N*3 75 Amp Contactor 75 Amps
Expedited shipping available
ALLEN BRADLEY 1745-LP101 SLC 100 PLC UNIT
ALLEN BRADLEY 1745-LP101 SLC 100 PROCESSOR UNIT
Allen Bradley Circuit Breaker 1492-CB1, G100, ser C
One-day shipping available
ALLEN BRADLEY 1492-GHD100 DOUBLE POLE CIRCUIT BREAKER
ALLEN BRADLEY 800H-W100E LEG. P. (FORWARD)
ALLEN BRADLEY 800H-W100E LEG. P. (ON)
ALLEN BRADLEY 800H-W100E LEG. P. (OFF-SYSTEM-ON)
ALLEN BRADLEY 800H-W100E LEG. PL. CLEAN/OFF/ON LINE
NEW ALLEN BRADLEY 7.5 AMP ULTRA 100 SERIES SERVO DRIVE
ALLEN BRADLEY MODEL 100-DL110 LUG KIT NEW
ALLEN BRADLEY 800H-W100E LEG. P. (MANUAL-AUTO) NNB
ALLEN BRADLEY 100-A24NB3 USPP 100A24NB3
ALLEN BRADLEY 1336S-BRF100-AN-EN3-HA2-L4 USPP 1336SBRF1
ALLEN BRADLEY 800H-W100E LEG. P. (MAN.-OFF-AUTO) NNB
ALLEN BRADLEY 100-M09N#3 CONTACT RELAY 110/120V IN NNB
Allen-Bradley SLC 100 PLC cat 1745-E101
ALLEN BRADLEY MOTOR STARTER 75 AMP MODEL 100A75NZ
LOT OF 4 ALLEN BRADLEY 100-A12ND3 CONTACTORS OVERLOADS
Allen Bradley Cat # 100-A45N*3 Contactor w/ 195-GA10
ALLEN BRADLEY 100-A30NH3 USPP 100A30NH3
ALLEN BRADLEY 100-A18ND3 NSPP 100A18ND3
ALLEN BRADLEY 800H-W100E LEG. P. PUSH-MAN/PULL-AUTO
ALLEN BRADLEY 100L-A20ND4 CONTACTOR
ALLEN BRADLEY 100-A24NJ3 NSFP 100A24NJ3
100 Allen Bradley 33K Ohm 1 Watt Carbon Resistor 5% NOS
ALLEN BRADLEY 100-A09NZ*3 CONTACTOR
ALLEN BRADLEY 100-A12NB3 USPP 100A12NB3
1494VDNL100 NEW ALLEN BRADLEY 1494V DNL100 FREE SHIP
One-day shipping available
Allen Bradley Contactor Relay 100-A09NZ*3 Series B
One-day shipping available
ALLEN BRADLEY 100-A24NZ24-3 NSFP 100A24NZ243
ALLEN BRADLEY 100-A12NZ3 USPP 100A12NZ3
ALLEN BRADLEY MODEL 100-DTS110 LUG SHIELD KIT NEW
8.2 o Allen Bradley Carbon Comp Resistors 1/4w 100pk AB
91ohm Allen Bradley Carbon Comp Resistors 1/4w 100pk AB
ALLEN BRADLEY 100-B110NZ243 110 A 24VDC COIL
Allen Bradley SLC 100 I/O Expansion Unit 1745-E101
390k Allen Bradley Carbon Comp Resistors 1/4w 100pcs AB
ALLEN BRADLEY 800H-W100 LEG. PL. GRAY BLANK NIB
Allen Bradley Surge Suppressor 100-FSV55, Series A
One-day shipping available
Allen Bradley 100-A18ND3
36ohm Allen Bradley Carbon Comp Resistors 1/4w 100pk AB
ALLEN BRADLEY 100-A12NT3 USPP 100A12NT3
Allen Bradley Aux. Contact Block 100-F Series A
One-day shipping available
Allen-Bradley 100W-B300ND3 100WB300ND3 ser A NEW IN BOX
Unused Allen Bradley Fuse Block 1491-N100
ALLEN BRADLEY 100-A09ND3 STARTER CONTACTOR 120VAC NEW!!
ALLEN BRADLEY 100-A24NZ24-3 USPP 100A24NZ243
Idec Izbarl IBRC 6062R Relay Barier IBRC6062R
idec Izbarl IBRC6102R Relay Barrier IBRC 6102R 16V 14mA
IDEC IZBARL IBRC-6062R RELAY BARRIER IBCR6062R
IDEC IZBARL Relay Barrier IBRC 6051R-2
NEW IDEC IZBARL IBRC4102FM CPU & FANUC A058-2308-C041
One-day shipping available
IDEC IZBARL Relay Barrier IBRC 6101R
GE Fanuc IDEC IZBARL IBRC410 IBRC 410 RELAY BARRIER
IDEC IZBARL IBRC 6012R Relay Barrier IBRC6012R NNB
IDEC IZBARL IBRC-6012R RELAY BARRIER 16VDC 14mA 250VAC
