1756-HSC
1756-HSC
1756-HSC
•說(shuō)明：
•在原點(diǎn)時(shí)將D8140的值清零(本程序中沒(méi)有做此功能)
•32位寄存器D8140是存放Y0的輸出脈沖數(shù)，正轉(zhuǎn)時(shí)增加，反轉(zhuǎn)時(shí)減少。當(dāng)正轉(zhuǎn)動(dòng)作到A點(diǎn)時(shí)，D8140的值是3000。此時(shí)閉合X1，機(jī)械反轉(zhuǎn)動(dòng)作到B點(diǎn)，也就是-3000的位置。D8140的值就是-3000。
•當(dāng)機(jī)械從A點(diǎn)向B點(diǎn)動(dòng)作過(guò)程中，X1斷開(kāi)(如在C點(diǎn)斷開(kāi))則D8140的值就是200，此時(shí)再閉合X0，機(jī)械正轉(zhuǎn)動(dòng)作到A點(diǎn)停止。
•當(dāng)機(jī)械停在A點(diǎn)時(shí)，再閉合X0，因?yàn)闄C(jī)械已經(jīng)在距離原點(diǎn)3000的位置上，故而機(jī)械沒(méi)有動(dòng)作！
•把程序中的絕對(duì)位置指令(DRVA)換成相對(duì)位置指令(DRVI)：
•當(dāng)機(jī)械在B點(diǎn)時(shí)(假設(shè)此時(shí)D8140的值是-3000)閉合X0，則機(jī)械正轉(zhuǎn)3000個(gè)脈沖停止，也就是停在了原點(diǎn)。D8140的值為0
•當(dāng)機(jī)械在B點(diǎn)時(shí)(假設(shè)此時(shí)D8140的值是-3000)閉合X1，則機(jī)械反轉(zhuǎn)3000個(gè)脈沖停止，也就是停在了左邊距離B點(diǎn)3000的位置(圖中未畫(huà)出)，D8140的值為-6000。
Lam Research 8 Turn RF Coil RD 853-330583-080
ENI OEM-12A XL RF Generator 1250W working
Thermo Noran Cold End TN-90-520 working T2108-01-14
ENI OEM-12A XL 1250W RF Generator OEM-12AL-01 working
Nikon NSR Series Robot Stage
Lam Research Gap Assembly 4520/i 853-140050-001-A-6882
Thermo Neslab DI Max Chiller DEI Water to Water Cooler
CTI Cryogenics Cryo-Torr 8R Cryopump
KLA-Tencor 2138 Motorized 200mm Retrofit 780-666008-000
Lam OnTrak DSS200
AMAT HiTek HiVolt Power Supply A1030050 9090-00397ITL
TEL Tokyo Electron 125mm Back Plane Heater A112489
Comdel CX-1250S RF Generator 1250W FP3212RC 0190-14206
Comdel CX-1250S RF Gen. FP3212R4 working 0190-01896
Comdel CX-1250S RF Gen. FP3209R1 working 0190-10584
Neslab HX 151g-CHX Chiller HX-151 Galden rebuilt
Comdel CX-1250S RF Generator 1250W FP3212RB 0190-09843
Nikon NSR Series FIAAF Process PCB
PRI Automation Gateway 1000 Load Port 300mm
Comdel CX-1250S RF Generator 0190-01183 working
HiTek Power Series 1000 Supply 9090-00397 ITL
ASML A5162, A5163 A/D TRANS PCB 8518518005
Nikon Metro 300mm INX/300 Dual Board Assy KAB11310/201K
ENI OEM-12 RF Generator 1250W OEM-12-11491
Asyst 300mm Wafer Prealigner EG-300B-012A
TEL Tokyo Electron 125mm Back Plane Heater A121382
TEL Tokyo Electron 200mm Back Plane Heater A116007
ENI OEM-12A RF Generator 1250W
Nikon Dual Board Assembly PCB 9700-5327-01
Spectra-Physics Laser Power Supply 2560-60
