| 詳細參數(shù) | |||
|---|---|---|---|
| 品牌 | 歐米伽 | 型號 | MKS氣體流量控制器AR流量計GE50A00410 |
| 類型 | 手持式壓力計 | 加工定制 | 否 |
| 測量范圍 | 1 | 精度等級 | 1 |
| 最大工作壓力 | 1 | 適用范圍 | 真空 |
| 產(chǎn)地 | 美國 | ||
INFICON 皮拉尼PSG500、PSG502-S、PSG510-S 和 PSG512-S型標準真空計采用當今市場上的數(shù)字皮拉尼技術(shù)。 不銹鋼傳感器單元堅固耐用，結(jié)構(gòu)設(shè)計緊湊，適用于半導(dǎo)體系統(tǒng)和標準應(yīng)用，例如前級真空管。
益處
類型
| PSG500 tungsten | PSG500-S tungsten, setpoints | PSG502-S nickel, setpoints | PSG510-S tungsten, setpoints, ceramic feedthroughs | PSG512-S nickel, setpoints, ceramic feedthroughs | ||
| 測量原則 | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | |
| 精度 (N2) | ||||||
| 1 x 10-3… 100 毫巴 | % of reading | ±15% | ±15% | ±15% | ±15% | ±15% |
| 5 x 10-4… 1 x 10-3 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
| 100 … 1000 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
| 可重復(fù)性（空氣） | ||||||
| 1 x 10-3… 100 毫巴 | % of reading | 2% | 2% | 2% | 2% | 2% |
| 輸出信號（測量信號） | ||||||
| 電壓范圍 | V | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 |
| 測量范圍 | V | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 |
| 測量范圍（空氣、O2、CO、N2） | mbar | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 |
| 設(shè)定點 | ||||||
| 設(shè)定點數(shù)量 | 2 | 2 | 2 | 2 | ||
| 設(shè)置范圍 | mbar | ? | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 |
| 滯后 | % of reading | ? | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold |
| 繼電器觸點 | V (dc) A (dc) | ? | 30 | 30 | 30 | 30 |
| 繼電器觸點： 轉(zhuǎn)換時間 | ms | ? | <20 | <20 | <20 | <20 |
| 電源電壓 | ||||||
| 真空計上 | V (dc) | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 |
| 波紋 | V (p-p) | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| 電壓與壓強 | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | |
| 內(nèi)部容積 | ||||||
| DN 16 ISO-KF，DN 16 CF-R，7/16-20 UNF | cm3 (in.3) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) |
| DN 16 ISO-KF & DN 16 CF-R 長管 | cm3 (in.3) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) |
| 1/8＇＇ NPT，4 VCR，8 VCR，1/2＇＇ 管 | cm3 (in.3) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) |
| 容許溫度 | ||||||
| 運行 | °C | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 |
| 真空連接 (1) | °C | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) |
| 貯存 | °C | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 |
| 重量 | ||||||
| DN 16 ISO-KF，7/16-20 UNF | g | 80 | 80 | 80 | 80 | 80 |
| DN 16 CF-R，4 VCR | g | 100 | 100 | 100 | 100 | 100 |
| 1/8＇＇ NPT，1/2＇＇ 管 | g | 70 | 70 | 70 | 70 | 70 |
| 8 VCR，DN 16 ISO-KF 長管 | g | 130 | 130 | 130 | 130 | 130 |
| DN 16 CF-R 長管 | g | 140 | 140 | 140 | 140 | 140 |
| 錯誤信號 | V | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) |
| 輸出電阻 | ? | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 |
| *小負載電阻 | k? | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof |
| 反應(yīng)時間 | ms | 80 | 80 | 80 | 80 | 80 |
| 真空計識別 | k? | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common |
| 調(diào)整 | one tactile switch for ATM ａnd HV adjustment | one tactile switch for ATM ａnd HV adjustment | one tactile switch for ATM ａnd HV adjustment | one tactile switch for ATM ａnd HV adjustment | one tactile switch for ATM ａnd HV adjustment | |
| 電流消耗 | mA | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) |
| 功耗 | W | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| 電氣連接 | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | |
| 傳感器電纜 | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | |
| 電纜長度 | m | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) |
| 暴露于真空的材料 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | |
| 單絲 | W | W | Ni | W | Ni | |
| 容許壓力 | bar (absolute) | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases |
| 安裝定位 | any | any | any | any | any | |
| 保護等級 | IP40 | IP40 | IP40 | IP40 | IP40 | |
